| Code# | 511-420 |
|---|---|
| Metal Stage Size | 308x408mm |
| Glass Stage Size | 198x306mm |
| Stage Travel Range | 250x150mm |
| Product Dimension | 1003x617x1309mm |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 521-120G |
|---|---|
| Marble Workbench | (458*358)mm |
| Glass Workbench | (356*248)mm |
| X/Y axis Travel | (300*200)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-320F |
|---|---|
| Marble Workbench | (408*308)mm |
| Glass Workbench | (306*198)mm |
| X/Y axis Travel | (250*150)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-420E |
|---|---|
| Marble Workbench | (270*350)mm |
| Glass Workbench | (142*242)mm |
| X/Y axis Travel | (200*100)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-420J |
|---|---|
| Marble Workbench | (650*580)mm |
| Glass Workbench | (540*440)mm |
| X/Y axis Travel | (500*400)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-320J |
|---|---|
| Marble Workbench | (650*580)mm |
| Glass Workbench | (540*440)mm |
| X/Y axis Travel | (500*400)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 522-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 522-180H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
