| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 511-410 |
|---|---|
| Metal Stage Size | 308x408mm |
| Glass Stage Size | 198x306mm |
| Stage Travel Range | 200x100mm |
| Product Dimension | 1003x617x1309mm |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 511-330 |
|---|---|
| Metal Stage Size | 258x308mm |
| Glass Stage Size | 148x206mm |
| Stage Travel Range | 150x100mm |
| Product Dimension | 988x563x1157mm |
| Code# | 510-340 |
|---|---|
| LCD Screen Size | 115mm×85mm |
| LCD Screen Resolution | 640*480 |
| Display Axis | 3-axis (X,Y,Z/Q) |
| Linear Scale Resolution | 0.1um,0.2um,0.5um, 1um,2um,5um |
| Code# | 525-020GP |
|---|---|
| Granite Stage | (505*350)mm |
| Glass Stage | (356*248)mm |
| X/Y Axis Travel | (300*200)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 525-020EP |
|---|---|
| Granite Stage | (390*220)mm |
| Glass Stage | (229.5*129.5)mm |
| X/Y Axis Travel | (200*100)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |