| Code# | 512-350 |
|---|---|
| Working Stage Size | 355x126mm |
| Working Stage Travel | 200x100mm |
| Focusing | 90mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 511-410 |
|---|---|
| Metal Stage Size | 308x408mm |
| Glass Stage Size | 198x306mm |
| Stage Travel Range | 200x100mm |
| Product Dimension | 1003x617x1309mm |
| Code# | 511-420 |
|---|---|
| Metal Stage Size | 308x408mm |
| Glass Stage Size | 198x306mm |
| Stage Travel Range | 250x150mm |
| Product Dimension | 1003x617x1309mm |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 511-420 |
|---|---|
| Metal Stage Size | 308x408mm |
| Glass Stage Size | 198x306mm |
| Stage Travel Range | 250x150mm |
| Product Dimension | 1003x617x1309mm |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-350 |
|---|---|
| Working Stage Size | 355x126mm |
| Working Stage Travel | 200x100mm |
| Focusing | 90mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 511-330 |
|---|---|
| Metal Stage Size | 258x308mm |
| Glass Stage Size | 148x206mm |
| Stage Travel Range | 150x100mm |
| Product Dimension | 988x563x1157mm |
