| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1000*800)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-280H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-180Q |
|---|---|
| X/Y Axis Travel | (1800*1200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤3.5+L/200(um) |
| Code# | 503-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Dimension(WxDxH) | (1195*832*1579)mm |
| Weight | 650Kg |
| Z Axis Travel | 200mm |
| Code# | 502-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Dimension(WxDxH) | (1337*840*1664)mm |
| Weight | 600Kg |
| Z Axis Travel | 200mm |
| Code# | 520-020 |
|---|---|
| Workbench | (245x180)mm |
| Glass Workbench | (130x130)mm |
| X/Y Axis Travel | (100*100)mm |
| X/Y axis resolution | Resolution: 0.5um |
| Code# | 500-080 |
|---|---|
| Lens | 0.088X Double Telecentric Lens |
| Working Distance | 120mm |
| Wide Field | Ø116mm(94x76) |
| Measurement Accuracy | ±4um |
| Code# | 523-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 525-120G |
|---|---|
| Marble Workbench | (505*350)mm |
| Glass Workbench | (356*248)mm |
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| Code# | 525-120H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
