| Code# | 503-120J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Dimension(WxDxH) | (1463*940*1591)mm |
| Weight | 780Kg |
| Z Axis Travel | 200mm |
| Code# | 502-320G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Dimension(WxDxH) | (1237*740*1664)mm |
| Weight | 380Kg |
| Z Axis Travel | 200mm |
| Code# | 502-320J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Dimension(WxDxH) | (1437*940*1664)mm |
| Weight | 750Kg |
| Z Axis Travel | 200mm |
| Code# | 524-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 500-030 |
|---|---|
| Lens | 0.3X Double Telecentric Lens |
| Working Distance | 110 Mm |
| Wide Field | Ø 30mm(28x24) |
| Measurement Accuracy | ±2um |
| Code# | 521-320H |
|---|---|
| Marble Workbench | (608*470)mm |
| Glass Workbench | (456*348)mm |
| X/Y axis Travel | (400*300)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 523-280N |
|---|---|
| X/Y Axis Travel | (1200*1000)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 502-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Dimension(WxDxH) | (1237*740*1664)mm |
| Weight | 380Kg |
| Z Axis Travel | 200mm |
| Code# | 524-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 524-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
