| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-350 |
|---|---|
| Working Stage Size | 355x126mm |
| Working Stage Travel | 200x100mm |
| Focusing | 90mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-350 |
|---|---|
| Working Stage Size | 355x126mm |
| Working Stage Travel | 200x100mm |
| Focusing | 90mm |
| Accuracy | ≤3+L/200(um) |