Code# | 512-400 |
---|---|
Working Stage Size | 455x126mm |
Working Stage Travel | 300x150mm |
Focusing | 120mm |
Accuracy | ≤3+L/200(um) |
Code# | 512-400 |
---|---|
Working Stage Size | 455x126mm |
Working Stage Travel | 300x150mm |
Focusing | 120mm |
Accuracy | ≤3+L/200(um) |
Code# | 512-400 |
---|---|
Working Stage Size | 455x126mm |
Working Stage Travel | 300x150mm |
Focusing | 120mm |
Accuracy | ≤3+L/200(um) |
Code# | 511-410 |
---|---|
Metal Stage Size | 308x408mm |
Glass Stage Size | 198x306mm |
Stage Travel Range | 200x100mm |
Product Dimension | 1003x617x1309mm |
Code# | 511-420 |
---|---|
Metal Stage Size | 308x408mm |
Glass Stage Size | 198x306mm |
Stage Travel Range | 250x150mm |
Product Dimension | 1003x617x1309mm |
Code# | 511-420 |
---|---|
Metal Stage Size | 308x408mm |
Glass Stage Size | 198x306mm |
Stage Travel Range | 250x150mm |
Product Dimension | 1003x617x1309mm |
Code# | 522-120G |
---|---|
X/Y Axis Travel | (300*200)mm |
Z Axis Travel | 200mm |
X/Y/Z axis Linear Scale | 0.5um |
XY Axis Accuracy | ≤2.0+L/200(um) |
Code# | 522-120H |
---|---|
X/Y Axis Travel | (400*300)mm |
Z Axis Travel | 200mm |
X/Y/Z axis Linear Scale | 0.5um |
XY Axis Accuracy | ≤2.0+L/200(um) |
Code# | 522-180H |
---|---|
X/Y Axis Travel | (400*300)mm |
Z Axis Travel | 200mm |
X/Y/Z axis Linear Scale | 0.1um |
XY Axis Accuracy | ≤1.8+L/200(um) |
Code# | 522-180J |
---|---|
X/Y Axis Travel | (500*400)mm |
Z Axis Travel | 200mm |
X/Y/Z axis Linear Scale | 0.1um |
XY Axis Accuracy | ≤1.8+L/200(um) |