| Code# | 525-020EP |
|---|---|
| Granite Stage | (390*220)mm |
| Glass Stage | (229.5*129.5)mm |
| X/Y Axis Travel | (200*100)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 502-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Dimension(WxDxH) | (1237*740*1664)mm |
| Weight | 380Kg |
| Z Axis Travel | 200mm |
| Code# | 529-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤2.5+L/200(um) |