| Code# | 523-180R |
|---|---|
| X/Y Axis Travel | (2600*1600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤4.0+L/200(um) |
| Code# | 522-180H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 522-280G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-380J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1000*800)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-280H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 525-180N |
|---|---|
| X/Y Axis Travel | (1000*1000)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 522-420G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-280K |
|---|---|
| X/Y Axis Travel | (600*500)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-480L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
