| Code# | 522-180J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 522-280G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-280K |
|---|---|
| X/Y Axis Travel | (600*500)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-480L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-280L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1500*1200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 500-080 |
|---|---|
| Lens | 0.088X Double Telecentric Lens |
| Working Distance | 120mm |
| Wide Field | Ø116mm(94x76) |
| Measurement Accuracy | ±4um |
| Range Of Travel(mm) | 600*800*600 |
|---|---|
| Maximum Weight Of The Measured Workpiece | 300Kg |
| Machine Weight | 730Kg |
| 3D Max. Speed (mm/s) | 520 |
| 3D Max. Acceleration (mm/s²) | 1730 |
| 3D Max. Speed | 520mm/s |
|---|---|
| 3D Max. Acceleration | 1730mm/s |
| Range Of Travel(mm) | 600*900*600 |
| Dimensions(mm) | 991*1488*2610 |
| Maximum Weight Of The Measured Workpiece | 300Kg |
