| Code# | 522-280G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 524-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 524-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 521-320F |
|---|---|
| Marble Workbench | (408*308)mm |
| Glass Workbench | (306*198)mm |
| X/Y axis Travel | (250*150)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-420E |
|---|---|
| Marble Workbench | (270*350)mm |
| Glass Workbench | (142*242)mm |
| X/Y axis Travel | (200*100)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-420J |
|---|---|
| Marble Workbench | (650*580)mm |
| Glass Workbench | (540*440)mm |
| X/Y axis Travel | (500*400)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-320H |
|---|---|
| Marble Workbench | (608*470)mm |
| Glass Workbench | (456*348)mm |
| X/Y axis Travel | (400*300)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 525-380K |
|---|---|
| X/Y Axis Travel | (500*500)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 521-320J |
|---|---|
| Marble Workbench | (650*580)mm |
| Glass Workbench | (540*440)mm |
| X/Y axis Travel | (500*400)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 528-180H |
|---|---|
| X/Y Axis Travel | (300*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution：0.1um |
| XY Axis Accuracy | ≤1.2+L/200(um) |
