| Code# | 525-020D |
|---|---|
| Granite Workbench | (310*220)mm |
| Glass Workbench | (179.5*129.5)mm |
| X/Y Axis Travel | (150*100)mm |
| Z Axis Travel | 100mm |
| Code# | 525-320H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| Code# | 524-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 524-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 525-120H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| Code# | 525-120G |
|---|---|
| Marble Workbench | (505*350)mm |
| Glass Workbench | (356*248)mm |
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| Code# | 525-020D |
|---|---|
| Granite Workbench | (310*220)mm |
| Glass Workbench | (179.5*129.5)mm |
| X/Y Axis Travel | (150*100)mm |
| Z Axis Travel | 100mm |
| Code# | 523-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Vimea322A | 524-220G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
