| Code# | 512-350 |
|---|---|
| Working Stage Size | 355x126mm |
| Working Stage Travel | 200x100mm |
| Focusing | 90mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-400 |
|---|---|
| Working Stage Size | 455x126mm |
| Working Stage Travel | 300x150mm |
| Focusing | 120mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 512-350 |
|---|---|
| Working Stage Size | 355x126mm |
| Working Stage Travel | 200x100mm |
| Focusing | 90mm |
| Accuracy | ≤3+L/200(um) |
| Code# | 525-180N |
|---|---|
| X/Y Axis Travel | (1000*1000)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 525-180X |
|---|---|
| X/Y Axis Travel | (500*1600)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 528-180H |
|---|---|
| X/Y Axis Travel | (300*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution：0.1um |
| XY Axis Accuracy | ≤1.2+L/200(um) |
| Code# | 523-280K |
|---|---|
| X/Y Axis Travel | (600*500)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-480L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
