| Code# | 511-330 |
|---|---|
| Metal Stage Size | 258x308mm |
| Glass Stage Size | 148x206mm |
| Stage Travel Range | 150x100mm |
| Product Dimension | 988x563x1157mm |
| Code# | 511-340 |
|---|---|
| Metal Stage Size | 258x358mm |
| Glass Stage Size | 148x256mm |
| Stage Travel Range | 200x100mm |
| Product Dimension | 988x563x1157mm |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 510-340 |
|---|---|
| LCD Screen Size | 115mm×85mm |
| LCD Screen Resolution | 640*480 |
| Display Axis | 3-axis (X,Y,Z/Q) |
| Linear Scale Resolution | 0.1um,0.2um,0.5um, 1um,2um,5um |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 522-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 525-180N |
|---|---|
| X/Y Axis Travel | (1000*1000)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 522-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 522-180H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 522-180J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
