| Code# | 511-330 |
|---|---|
| Metal Stage Size | 258x308mm |
| Glass Stage Size | 148x206mm |
| Stage Travel Range | 150x100mm |
| Product Dimension | 988x563x1157mm |
| Code# | 511-340 |
|---|---|
| Metal Stage Size | 258x358mm |
| Glass Stage Size | 148x256mm |
| Stage Travel Range | 200x100mm |
| Product Dimension | 988x563x1157mm |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Code# | 510-340 |
|---|---|
| LCD Screen Size | 115mm×85mm |
| LCD Screen Resolution | 640*480 |
| Display Axis | 3-axis (X,Y,Z/Q) |
| Linear Scale Resolution | 0.1um,0.2um,0.5um, 1um,2um,5um |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
