| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z Axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |