Measuring Range | 115*145*75mm |
---|---|
Accuracy | ±1.5μm |
Capacity | 5Kg |
Repeatability | ± 1.5μm |
Minimum Unit | 0.1μm |
Measuring Range | 215*145*75mm |
---|---|
Accuracy | ±1.5μm |
Capacity | 5Kg |
Repeatability | ± 1.5μm |
Minimum Unit | 0.1μm |
Measuring Range | φ100mm |
---|---|
Accuracy | ±1.5μm |
Capacity | 5Kg |
Repeatability | ± 1.5μm |
Minimum Unit | 0.1μm |
Code# | 520-020 |
---|---|
Workbench | (245x180)mm |
Glass Workbench | (130x130)mm |
X/Y Axis Travel | (100*100)mm |
X/Y axis resolution | Resolution: 0.5um |
Code# | 502-120H |
---|---|
X/Y Axis Travel | (400*300)mm |
Dimension(WxDxH) | (1337*840*1664)mm |
Weight | 600Kg |
Z Axis Travel | 200mm |
Code# | 503-120J |
---|---|
X/Y Axis Travel | (500*400)mm |
Dimension(WxDxH) | (1463*940*1591)mm |
Weight | 780Kg |
Z Axis Travel | 200mm |
Code# | 502-120H |
---|---|
X/Y Axis Travel | (400*300)mm |
Dimension(WxDxH) | (1337*840*1664)mm |
Weight | 600Kg |
Z Axis Travel | 200mm |
Code# | 500-030 |
---|---|
Lens | 0.3X Double Telecentric Lens |
Working Distance | 110 Mm |
Wide Field | Ø 30mm(28x24) |
Measurement Accuracy | ±2um |
Code# | 503-120H |
---|---|
X/Y Axis Travel | (400*300)mm |
Dimension(WxDxH) | (1195*832*1579)mm |
Weight | 650Kg |
Z Axis Travel | 200mm |
Code# | 502-320J |
---|---|
X/Y Axis Travel | (500*400)mm |
Dimension(WxDxH) | (1437*940*1664)mm |
Weight | 750Kg |
Z Axis Travel | 200mm |