Code# | 525-020EP |
---|---|
Granite Stage | (390*220)mm |
Glass Stage | (229.5*129.5)mm |
X/Y Axis Travel | (200*100)mm |
Linear Scales | Resolution: 0.5um |
Code# | 525-020GP |
---|---|
Granite Stage | (505*350)mm |
Glass Stage | (356*248)mm |
X/Y Axis Travel | (300*200)mm |
Linear Scales | Resolution: 0.5um |
Code# | 525-020DP |
---|---|
Granite Stage | (310*220) Mm |
Glass Stage | (179.5*129.5) Mm |
X/Y Axis Travel | (150*100) Mm |
Linear Scales | Resolution: 0.5um |