| Code# | 522-180J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 522-280G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 522-420G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-480L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-280L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1000*800)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1500*1200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 523-280N |
|---|---|
| X/Y Axis Travel | (1200*1000)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 525-020P |
|---|---|
| Granite Stage | (310*220) Mm |
| Glass Stage | (179.5*129.5) Mm |
| X/Y Axis Travel | (150*100) Mm |
| X/Y Linear Scales | Resolution: 0.5um |
| Range Of Travel(mm) | 600*800*600 |
|---|---|
| Maximum Weight Of The Measured Workpiece | 300Kg |
| Machine Weight | 730Kg |
| 3D Max. Speed (mm/s) | 520 |
| 3D Max. Acceleration (mm/s²) | 1730 |
