Code# | 525-020P |
---|---|
Granite Stage | (310*220) Mm |
Glass Stage | (179.5*129.5) Mm |
X/Y Axis Travel | (150*100) Mm |
X/Y Linear Scales | Resolution: 0.5um |
Code# | 542-310 |
---|---|
Working Stage Travel | 355x125mm |
X/Y-axis Travel | 200x120mm |
Z Axis | 110mm |
Measurement Accuracy | ≤3+L/200um |
Code# | 542-310 |
---|---|
Working Stage Travel | 355x125mm |
X/Y-axis Travel | 200x120mm |
Z Axis | 110mm |
Measurement Accuracy | ≤3+L/200um |
Code# | 525-380K |
---|---|
X/Y Axis Travel | (500*500)mm |
Z Axis Travel | 300mm |
X/Y/Z Axis Linear Scale | Resolution: 0.1um |
Guidance Mode | Precision Linear Guide Rail |
Code# | 542-310 |
---|---|
Working Stage Travel | 355x125mm |
X/Y-axis Travel | 200x120mm |
Z Axis | 110mm |
Measurement Accuracy | ≤3+L/200um |
Code# | 524-220H |
---|---|
X/Y Axis Travel | (400*300)mm |
Z Axis Travel | 200mm |
X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
Repeatability | 2um |
Code# | 524-220H |
---|---|
X/Y Axis Travel | (400*300)mm |
Z Axis Travel | 200mm |
X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
Repeatability | 2um |
Code# | 529-120G |
---|---|
X/Y Axis Travel | (300*200)mm |
Z Axis Travel | 200mm |
X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
XY Axis Accuracy | ≤2.5+L/200(um) |
Code# | 529-120J |
---|---|
X/Y Axis Travel | (500*400)mm |
Z Axis Travel | 200mm |
X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
XY Axis Accuracy | ≤3.0+L/200(um) |
Code# | 529-120H |
---|---|
X/Y Axis Travel | (400*300)mm |
Z Axis Travel | 200mm |
X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
XY Axis Accuracy | ≤3.0+L/200(um) |