| Code# | 520-020 |
|---|---|
| Workbench | (245x180)mm |
| Glass Workbench | (130x130)mm |
| X/Y Axis Travel | (100*100)mm |
| X/Y axis resolution | Resolution: 0.5um |
| Code# | 525-120H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| Code# | 525-020D |
|---|---|
| Granite Workbench | (310*220)mm |
| Glass Workbench | (179.5*129.5)mm |
| X/Y Axis Travel | (150*100)mm |
| Z Axis Travel | 100mm |
| Code# | 525-320H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| Code# | 525-020D |
|---|---|
| Granite Workbench | (310*220)mm |
| Glass Workbench | (179.5*129.5)mm |
| X/Y Axis Travel | (150*100)mm |
| Z Axis Travel | 100mm |
| Code# | 500-080 |
|---|---|
| Lens | 0.088X Double Telecentric Lens |
| Working Distance | 120mm |
| Wide Field | Ø116mm(94x76) |
| Measurement Accuracy | ±4um |
| Code# | 523-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Vimea322A | 524-220G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 500-031 |
|---|---|
| Measuring Range | 300x200x75mm |
| Minimum Unit | 0.1μm |
| Capacity | 5Kg |
| High-Precision Mode | 26x18mm |
| Vimea322A | 524-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale（mm） | Resolution: 0.5um |
| Repeatability | 2um |
