| Code# | 528-180H |
|---|---|
| X/Y Axis Travel | (300*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution：0.1um |
| XY Axis Accuracy | ≤1.2+L/200(um) |
| Code# | 521-420E |
|---|---|
| Marble Workbench | (270*350)mm |
| Glass Workbench | (142*242)mm |
| X/Y axis Travel | (200*100)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 522-420G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1000*800)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-380J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 525-120G |
|---|---|
| Marble Workbench | (505*350)mm |
| Glass Workbench | (356*248)mm |
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| Code# | 521-120G |
|---|---|
| Marble Workbench | (458*358)mm |
| Glass Workbench | (356*248)mm |
| X/Y axis Travel | (300*200)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-320F |
|---|---|
| Marble Workbench | (408*308)mm |
| Glass Workbench | (306*198)mm |
| X/Y axis Travel | (250*150)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-320H |
|---|---|
| Marble Workbench | (608*470)mm |
| Glass Workbench | (456*348)mm |
| X/Y axis Travel | (400*300)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 522-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
