Code# | 542-310 |
---|---|
Working Stage Travel | 355x125mm |
X/Y-axis Travel | 200x120mm |
Z Axis | 110mm |
Measurement Accuracy | ≤3+L/200um |
Code# | 511-330 |
---|---|
Metal Stage Size | 258x308mm |
Glass Stage Size | 148x206mm |
Stage Travel Range | 150x100mm |
Product Dimension | 988x563x1157mm |
Code# | 511-420 |
---|---|
Metal Stage Size | 308x408mm |
Glass Stage Size | 198x306mm |
Stage Travel Range | 250x150mm |
Product Dimension | 1003x617x1309mm |
Code# | 510-340 |
---|---|
LCD Screen Size | 115mm×85mm |
LCD Screen Resolution | 640*480 |
Display Axis | 3-axis (X,Y,Z/Q) |
Linear Scale Resolution | 0.1um,0.2um,0.5um, 1um,2um,5um |
Code# | 510-340 |
---|---|
LCD Screen Size | 115mm×85mm |
LCD Screen Resolution | 640*480 |
Display Axis | 3-axis (X,Y,Z/Q) |
Linear Scale Resolution | 0.1um,0.2um,0.5um, 1um,2um,5um |
Code# | 511-340 |
---|---|
Metal Stage Size | 258x358mm |
Glass Stage Size | 148x256mm |
Stage Travel Range | 200x100mm |
Product Dimension | 988x563x1157mm |
Code# | 511-410 |
---|---|
Metal Stage Size | 308x408mm |
Glass Stage Size | 198x306mm |
Stage Travel Range | 200x100mm |
Product Dimension | 1003x617x1309mm |