| Code# | 502-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 503-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Dimension(WxDxH) | (1195*832*1579)mm |
| Weight | 650Kg |
| Z Axis Travel | 200mm |
| Code# | 528-180H |
|---|---|
| X/Y Axis Travel | (300*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution:0.1um |
| XY Axis Accuracy | ≤1.2+L/200(um) |
| Vimea322A | 524-220G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 524-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 529-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 529-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 529-120J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 522-280G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 522-180J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |