| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1500*1200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 523-280L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1000*800)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 503-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Dimension(WxDxH) | (1195*832*1579)mm |
| Weight | 650Kg |
| Z Axis Travel | 200mm |
| Code# | 503-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Dimension(WxDxH) | (1195*832*1579)mm |
| Weight | 650Kg |
| Z Axis Travel | 200mm |
| Code# | 502-320J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Dimension(WxDxH) | (1437*940*1664)mm |
| Weight | 750Kg |
| Z Axis Travel | 200mm |
| Code# | 502-320J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Dimension(WxDxH) | (1437*940*1664)mm |
| Weight | 750Kg |
| Z Axis Travel | 200mm |
| Code# | 503-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Dimension(WxDxH) | (1195*832*1579)mm |
| Weight | 650Kg |
| Z Axis Travel | 200mm |
| Code# | 529-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 529-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤3.0+L/200(um) |