Code# | 523-180Q |
---|---|
X/Y Axis Travel | (1800*1200)mm |
Z Axis Travel | 200mm |
X/Y/Z Axis Linear Scale | Resolution: 0.1um |
XY Axis Accuracy | ≤3.5+L/200(um) |
Code# | 502-120G |
---|---|
X/Y Axis Travel | (300*200)mm |
Dimension(WxDxH) | (1237*740*1664)mm |
Weight | 380Kg |
Z Axis Travel | 200mm |
Code# | 522-180H |
---|---|
X/Y Axis Travel | (400*300)mm |
Z Axis Travel | 200mm |
X/Y/Z axis Linear Scale | 0.1um |
XY Axis Accuracy | ≤1.8+L/200(um) |