| Code# | 529-120J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 527-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Measuring Range | 115*145*75mm |
|---|---|
| Accuracy | ±1.5μm |
| Capacity | 5Kg |
| Repeatability | ± 1.5μm |
| Minimum Unit | 0.1μm |
| Measuring Range | 215*145*75mm |
|---|---|
| Accuracy | ±1.5μm |
| Capacity | 5Kg |
| Repeatability | ± 1.5μm |
| Minimum Unit | 0.1μm |
| Measuring Range | φ100mm |
|---|---|
| Accuracy | ±1.5μm |
| Capacity | 5Kg |
| Repeatability | ± 1.5μm |
| Minimum Unit | 0.1μm |
| Code# | 500-030 |
|---|---|
| Lens | 0.3X Double Telecentric Lens |
| Working Distance | 110 Mm |
| Wide Field | Ø 30mm(28x24) |
| Measurement Accuracy | ±2um |
| Code# | 525-120G |
|---|---|
| Marble Workbench | (505*350)mm |
| Glass Workbench | (356*248)mm |
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| Code# | 521-320F |
|---|---|
| Marble Workbench | (408*308)mm |
| Glass Workbench | (306*198)mm |
| X/Y axis Travel | (250*150)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 521-320J |
|---|---|
| Marble Workbench | (650*580)mm |
| Glass Workbench | (540*440)mm |
| X/Y axis Travel | (500*400)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 525-120H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |