| Code# | 525-320H |
|---|---|
| Marble Workbench | (605*450)mm |
| Glass Workbench | (456*348)mm |
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| Code# | 524-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| Repeatability | 2um |
| Code# | 525-020D |
|---|---|
| Granite Workbench | (310*220)mm |
| Glass Workbench | (179.5*129.5)mm |
| X/Y Axis Travel | (150*100)mm |
| Z Axis Travel | 100mm |
| Code# | 525-020EP |
|---|---|
| Granite Stage | (390*220)mm |
| Glass Stage | (229.5*129.5)mm |
| X/Y Axis Travel | (200*100)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 502-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Dimension(WxDxH) | (1237*740*1664)mm |
| Weight | 380Kg |
| Z Axis Travel | 200mm |
| Code# | 529-120J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 523-220H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 529-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤3.0+L/200(um) |
| Code# | 529-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Vimea322A | 524-220G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z 3 Axis Linear Scale(mm) | Resolution: 0.5um |
| Repeatability | 2um |