| Code# | 528-180H |
|---|---|
| X/Y Axis Travel | (300*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution:0.1um |
| XY Axis Accuracy | ≤1.2+L/200(um) |
| Code# | 525-180N |
|---|---|
| X/Y Axis Travel | (1000*1000)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 522-120H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 522-420G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 525-180X |
|---|---|
| X/Y Axis Travel | (500*1600)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 523-480L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 523-180M |
|---|---|
| X/Y Axis Travel | (1000*800)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-280H |
|---|---|
| X/Y Axis Travel | (400*300)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 451-410 |
|---|---|
| Electronic Magnification | 8X~206X (16:9 21”Monitor) |
| Optical Objective | 0.7X~4.5X Horizontal Zoom Lens |
| Camera Parameters | 2 Million Pixel (1920*1080) |
| Z-axis Travel | 150mm |
| Code# | 523-180Q |
|---|---|
| X/Y Axis Travel | (1800*1200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤3.5+L/200(um) |