| Code# | 521-420J |
|---|---|
| Marble Workbench | (650*580)mm |
| Glass Workbench | (540*440)mm |
| X/Y axis Travel | (500*400)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 522-120G |
|---|---|
| X/Y Axis Travel | (300*200)mm |
| Z Axis Travel | 200mm |
| X/Y/Z axis Linear Scale | 0.5um |
| XY Axis Accuracy | ≤2.0+L/200(um) |
| Code# | 523-280L |
|---|---|
| X/Y Axis Travel | (800*600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 525-380K |
|---|---|
| X/Y Axis Travel | (500*500)mm |
| Z Axis Travel | 300mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| Guidance Mode | Precision Linear Guide Rail |
| Code# | 523-180R |
|---|---|
| X/Y Axis Travel | (2600*1600)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤4.0+L/200(um) |
| Code# | 523-280N |
|---|---|
| X/Y Axis Travel | (1200*1000)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤2.5+L/200(um) |
| Code# | 523-380J |
|---|---|
| X/Y Axis Travel | (500*400)mm |
| Z Axis Travel | 200mm |
| X/Y/Z Axis Linear Scale | Resolution: 0.1um |
| XY Axis Accuracy | ≤1.8+L/200(um) |
| Code# | 521-320H |
|---|---|
| Marble Workbench | (608*470)mm |
| Glass Workbench | (456*348)mm |
| X/Y axis Travel | (400*300)mm |
| Z axis travel | Effective Travel 200mm |
| Code# | 823-170-2005 |
|---|---|
| Loading System | Automatic |
| Motorized X-Y Stage | Mini-Step-Motor With Size L:180*W:140mm |
| X-Y Stage Stroke | 50x50mm |
| Minimum Step | 0.625um |
| Code# | 520-020 |
|---|---|
| Workbench | (245x180)mm |
| Glass Workbench | (130x130)mm |
| X/Y Axis Travel | (100*100)mm |
| X/Y axis resolution | Resolution: 0.5um |